Inventor
WORTMAN JIMMIE J
5 patents
⚠️ This page may combine multiple inventors who share the name “WORTMAN JIMMIE J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV NORTH CAROLINA STATE
3 patentsUS5336903AAug 9, 1994
Selective deposition of doped silicon-germanium alloy on semiconductor substrate, and resulting structures
UNIV NORTH CAROLINA STATE55 citations94
US5418885AMay 23, 1995
Three-zone rapid thermal processing system utilizing wafer edge heating means
UNIV NORTH CAROLINA STATE92 citations93
US5253324AOct 12, 1993
Conical rapid thermal processing apparatus
UNIV NORTH CAROLINA STATE30 citations89