Inventor
KITAKOHJI TOSHISUKE
9 patents
Patents
9 patentsUS4600685AJul 15, 1986
Patterning process using ladder-type organosiloxane resin and process for production of electronic devices utilizing said patterning process
FUJITSU LTD60 citations96
US4267258AMay 12, 1981
Negative type deep ultraviolet resist
FUJITSU LTD39 citations90
US4464455AAug 7, 1984
Dry-developing negative resist composition
FUJITSU LTD7 citations72
US4276365AJun 30, 1981
Positive resist terpolymer composition and method of forming resist pattern
FUJITSU LTD8 citations71
US5994144ANov 30, 1999
Simplified environmental atmosphere measuring method
FUJITSU LTD6 citations69
US4345020AAug 17, 1982
Positive resist polymer composition and method of forming resist pattern
FUJITSU LTD5 citations60
US4273856AJun 16, 1981
Positive resist terpolymer composition and method of forming resist pattern
FUJITSU LTD3 citations60
US5985213ANov 16, 1999
Simplified environmental atmosphere measuring apparatus
FUJITSU LTD4 citations58
US5750406AMay 12, 1998
Environment monitoring test piece and test method
FUJITSU LTD1 citations48