Inventor

BIHR JOHANNES

DE8 patents

⚠️ This page may combine multiple inventors who share the name “BIHR JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL NTS GMBH

3 patents

US7645989B2Jan 12, 2010

Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof

ZEISS CARL NTS GMBH13 citations79

US7060978B2Jun 13, 2006

Detector system for a particle beam apparatus, and particle beam apparatus with such a detector system

ZEISS CARL NTS GMBH4 citations60

US7285780B2Oct 23, 2007

Detector system for a scanning electron microscope and a scanning electron microscope incorporating said detector system

ZEISS CARL NTS GMBH4 citations53

ZEISS STIFTUNG

2 patents

US5177361AJan 5, 1993

Electron energy filter

ZEISS STIFTUNG25 citations85

US5134339AJul 28, 1992

High-voltage lead-through for particle-beam apparatus

ZEISS STIFTUNG1 citations48

ALIS CORP

1 patent

US7521693B2Apr 21, 2009

Ion sources, systems and methods

ALIS CORP23 citations92

LEO ELEKTRONENMIKROSKOPIE GMBH

1 patent

US6239430B1May 29, 2001

Particle beam apparatus with energy filter

LEO ELEKTRONENMIKROSKOPIE GMBH24 citations91

BIHR JOHANNES

1 patent

US8058614B2Nov 15, 2011

Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof

BIHR JOHANNES1 citations42