P

Inventor

KILPI VAINO

FI11 patents
⚠️ This page may combine multiple inventors who share the name “KILPI VAINO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PICOSUN OY

4 patents
US9868131B2Jan 16, 2018

Atomic layer deposition with plasma source

PICOSUN OY414 citations98
US12383923B2Aug 12, 2025

Atomic layer deposition with plasma source

PICOSUN OY0 citations62
US11280001B2Mar 22, 2022

Substrate loading in an ALD reactor

PICOSUN OY1 citations62
US10161038B2Dec 25, 2018

Substrate loading in an ALD reactor

PICOSUN OY1 citations52

ASM MICROCHEMISTRY OY

3 patents
US6447607B2Sep 10, 2002

Apparatus for growing thin films

ASM MICROCHEMISTRY OY143 citations98
US6551406B2Apr 22, 2003

Apparatus for growing thin films

ASM MICROCHEMISTRY OY163 citations97
US6689210B2Feb 10, 2004

Apparatus for growing thin films

ASM MICROCHEMISTRY OY6 citations73

KILPI VAINO

2 patents
US9095869B2Aug 4, 2015

Atomic layer deposition with plasma source

KILPI VAINO360 citations97
US10494718B2Dec 3, 2019

Deposition reactor with plasma source

KILPI VAINO0 citations39

ASM INT

1 patent
US6835416B2Dec 28, 2004

Apparatus for growing thin films

ASM INT5 citations73

WAERTSILAE OY AB

1 patent
US4621379ANov 11, 1986

Flushing operating means for vacuum toilet

WAERTSILAE OY AB9 citations73