Inventor
OTANI MASAMI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “OTANI MASAMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
3 patentsUS4846623AJul 11, 1989
Wafer transferring device
DAINIPPON SCREEN MFG38 citations87
US4362376ADec 7, 1982
Film processor with a by-pass transferring mechanism
DAINIPPON SCREEN MFG12 citations69
US7231273B2Jun 12, 2007
Substrate processing apparatus and method including obstacle detection
DAINIPPON SCREEN MFG4 citations60