Inventor

PHILLIPS JR ANTHONY R

US3 patents

⚠️ This page may combine multiple inventors who share the name “PHILLIPS JR ANTHONY R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TROPEL CORP

2 patents

US5353322AOct 4, 1994

Lens system for X-ray projection lithography camera

TROPEL CORP103 citations94

US5650877AJul 22, 1997

Imaging system for deep ultraviolet lithography

TROPEL CORP89 citations93

GEN SIGNAL CORP

1 patent

US5220590AJun 15, 1993

X-ray projection lithography camera

GEN SIGNAL CORP78 citations95