Inventor

SHAFER DAVID R

US81 patents

⚠️ This page may combine multiple inventors who share the name “SHAFER DAVID R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHAFER DAVID R

PERKIN ELMER CORP

Ring field projection system

Restrictive off-axis field optical system

Catadioptric telescopes

Four mirror unobscurred anastigmatic telescope with all spherical surfaces

Optical relay system with magnification

Lens usable in the ultraviolet

Monocentric optical systems

Laser beam expander

Optical system for correcting the aberrations of a beamsplitter in converging light

ZEISS STIFTUNG

Microlithographic reduction projection catadioptric objective

Microlithographic reduction projection catadioptric objective

Catadioptric objective comprising two intermediate images

Microlithographic reduction projection catadioptric objective

Projection exposure lens with aspheric elements

Catadioptric optical system and exposure apparatus having the same

Optical projection system

ZEISS CARL SMT AG

Catadioptric projection objective with geometric beam splitting

Objectives as a microlithography projection objective with at least one liquid lens

Catadioptric projection objective with geometric beam splitting

6-mirror projection objective with few lenses

Objectives as a microlithography projection objective with at least one liquid lens

Catadioptric reduction lens

Catadioptric reductions lens

KLA TENCOR CORP

Ultra-broadband UV microscope imaging system with wide range zoom capability

Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system

Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system

Ultra-broadband UV microscope imaging system with wide range zoom capability

Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system

KLA TENCOR TECH CORP

Broad band DUV, VUV long-working distance catadioptric imaging system

Broad band DUV, VUV long-working distance catadioptric imaging system

Broad spectrum ultraviolet inspection systems employing catadioptric imaging

Broad band objective having improved lateral color performance

KLA INSTR CORP

Broad spectrum ultraviolet catadioptric imaging system

Broad spectrum ultraviolet inspection methods employing catadioptric imaging

Broad spectrum ultraviolet catadioptric imaging system

ULTRATECH STEPPER INC

Four-mirror extreme ultraviolet (EUV) lithography projection system

Reflective projection system comprising four spherical mirrors

Illumination system for half-field dyson stepper

UNIV CALIFORNIA

Reflective optical imaging system

Reflective optical imaging system with balanced distortion

Reflective optical imaging method and circuit

(unassigned)

High numerical aperture ring field projection system for extreme ultraviolet lithography

ZEISS CARL SEMICONDUCTOR MFG

Projection objective having adjacently mounted aspheric lens surfaces

ZEISS CARL

Optical projection lens system

GEN SIGNAL CORP

X-ray projection lithography camera

TROPEL CORP

Lens system for X-ray projection lithography camera

ZEISS CARL SMT GMBH

Microlithographic reduction projection catadioptric objective

KLA TENCOR INC

Broad spectrum ultraviolet inspection methods employing catadioptric imaging

SPECTRA TECH INC

High magnification reflecting microscope objective having a dual magnification mode and zoom magnification capability

KLA TENCOR TECHNOLOGIES INC

Inspection system using small catadioptric objective