P

Inventor

SHOJI TATSUO

JP12 patents
⚠️ This page may combine multiple inventors who share the name “SHOJI TATSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PLASMA & MATERIALS TECH

3 patents
US5091049AFeb 25, 1992

High density plasma deposition and etching apparatus

PLASMA & MATERIALS TECH150 citations96
US4990229AFeb 5, 1991

High density plasma deposition and etching apparatus

PLASMA & MATERIALS TECH363 citations96
US5122251AJun 16, 1992

High density plasma deposition and etching apparatus

PLASMA & MATERIALS TECH281 citations94

NAKA CORP

3 patents
US4996804AMar 5, 1991

Device and structure for supporting floor panels

NAKA CORP170 citations95
US5072557ADec 17, 1991

Device for fixing floor panels

NAKA CORP102 citations93
US5162612ANov 10, 1992

Closure plate for covering opening of floor panels

NAKA CORP23 citations90

JAPAN SCIENCE & TECH AGENCY

2 patents
US7785441B2Aug 31, 2010

Plasma generator, plasma control method, and method of producing substrate

JAPAN SCIENCE & TECH AGENCY9 citations83
US7567037B2Jul 28, 2009

High frequency power supply device and plasma generator

JAPAN SCIENCE & TECH AGENCY17 citations80

NAKA TECHNICAL LAB

1 patent
US4922670AMay 8, 1990

Free access floor and method of constructing the same

NAKA TECHNICAL LAB174 citations96

NAKA TECH LAB

1 patent
US4593493AJun 10, 1986

Access door

NAKA TECH LAB29 citations92

JAPAN SCIENCE & TECH CORP

1 patent
US7098599B2Aug 29, 2006

Plasma generator

JAPAN SCIENCE & TECH CORP10 citations72

MIYAKE SHOJI

1 patent
US8444806B2May 21, 2013

Plasma generator, plasma control method and method of producing substrate

MIYAKE SHOJI2 citations55