Inventor
KUIBIRA AKIRA
JP30 patents
Patents
30 patentsUS7090394B2Aug 15, 2006
Temperature gauge and ceramic susceptor in which it is utilized
SUMITOMO ELECTRIC INDUSTRIES478 citations99
US6963052B2Nov 8, 2005
Heater module for semiconductor manufacturing equipment
SUMITOMO ELECTRIC INDUSTRIES417 citations99
US6460482B1Oct 8, 2002
Gas shower unit for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus
SUMITOMO ELECTRIC INDUSTRIES383 citations99
US6554906B1Apr 29, 2003
Wafer holder for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus using the same
SUMITOMO ELECTRIC INDUSTRIES64 citations96
US6508884B2Jan 21, 2003
Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatus
SUMITOMO ELECTRIC INDUSTRIES48 citations96
US6403510B1Jun 11, 2002
Aluminum nitride sintered body and manufacturing method thereof
SUMITOMO ELECTRIC INDUSTRIES24 citations93
US6365879B1Apr 2, 2002
Wafer holder for semiconductor manufacturing apparatus
SUMITOMO ELECTRIC INDUSTRIES40 citations93
US7268322B2Sep 11, 2007
Semiconductor heating apparatus
SUMITOMO ELECTRIC INDUSTRIES30 citations92
US6664515B2Dec 16, 2003
Circuit pattern of resistance heating elements and substrate-treating apparatus incorporating the pattern
SUMITOMO ELECTRIC INDUSTRIES38 citations92
US7361230B2Apr 22, 2008
Substrate processing apparatus
SUMITOMO ELECTRIC INDUSTRIES17 citations84
US7211153B2May 1, 2007
Ceramic joined body, substrate holding structure and substrate processing apparatus
SUMITOMO ELECTRIC INDUSTRIES17 citations84
US7045045B2May 16, 2006
Workpiece holder for processing apparatus, and processing apparatus using the same
SUMITOMO ELECTRIC INDUSTRIES14 citations84
US7491432B2Feb 17, 2009
Ceramic susceptor for semiconductor manufacturing equipment
SUMITOMO ELECTRIC INDUSTRIES11 citations79
US6716304B2Apr 6, 2004
Wafer holder for semiconductor manufacturing apparatus, and method of manufacturing the wafer holder
SUMITOMO ELECTRIC INDUSTRIES8 citations74
US5234642AAug 10, 1993
High strength silicon nitride sintered body and process for producing same
SUMITOMO ELECTRIC INDUSTRIES16 citations74
US5922629AJul 13, 1999
Silicon nitride ceramic sliding material and process for producing the same
SUMITOMO ELECTRIC INDUSTRIES7 citations73
US7999210B2Aug 16, 2011
Heating device for manufacturing semiconductor
SUMITOMO ELECTRIC INDUSTRIES2 citations63
US7837798B2Nov 23, 2010
Semiconductor processing apparatus with a heat resistant hermetically sealed substrate support
SUMITOMO ELECTRIC INDUSTRIES2 citations63
US7806984B2Oct 5, 2010
Semiconductor or liquid crystal producing device
SUMITOMO ELECTRIC INDUSTRIES4 citations63
US7414823B2Aug 19, 2008
Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installed
SUMITOMO ELECTRIC INDUSTRIES6 citations63
US7394043B2Jul 1, 2008
Ceramic susceptor
SUMITOMO ELECTRIC INDUSTRIES4 citations63
US7268321B2Sep 11, 2007
Wafer holder and semiconductor manufacturing apparatus
SUMITOMO ELECTRIC INDUSTRIES3 citations63
US7090423B2Aug 15, 2006
Connecting structures
SUMITOMO ELECTRIC INDUSTRIES3 citations63
US6946625B2Sep 20, 2005
Ceramic susceptor
SUMITOMO ELECTRIC INDUSTRIES4 citations63
US6806443B2Oct 19, 2004
Ceramic susceptor
SUMITOMO ELECTRIC INDUSTRIES3 citations63
US5328876AJul 12, 1994
High strength silicon nitride sintered body and process for producing same
SUMITOMO ELECTRIC INDUSTRIES4 citations63
US6653604B2Nov 25, 2003
Heater member for mounting heating object and substrate processing apparatus using the same
SUMITOMO ELECTRIC INDUSTRIES3 citations62
US7408131B2Aug 5, 2008
Wafer holder and semiconductor manufacturing apparatus
SUMITOMO ELECTRIC INDUSTRIES0 citations52
US7264699B2Sep 4, 2007
Workpiece holder for processing apparatus, and processing apparatus using the same
SUMITOMO ELECTRIC INDUSTRIES1 citations52
US7145106B2Dec 5, 2006
Heater module for semiconductor manufacturing equipment
SUMITOMO ELECTRIC INDUSTRIES1 citations52