Inventor
MORDO DAVID
US15 patents
⚠️ This page may combine multiple inventors who share the name “MORDO DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
10 patentsUS7265061B1Sep 4, 2007
Method and apparatus for UV exposure of low dielectric constant materials for porogen removal and improved mechanical properties
NOVELLUS SYSTEMS INC632 citations98
US7253125B1Aug 7, 2007
Method to improve mechanical strength of low-k dielectric film using modulated UV exposure
NOVELLUS SYSTEMS INC82 citations97
US7241704B1Jul 10, 2007
Methods for producing low stress porous low-k dielectric materials using precursors with organic functional groups
NOVELLUS SYSTEMS INC58 citations96
US7611757B1Nov 3, 2009
Method to improve mechanical strength of low-K dielectric film using modulated UV exposure
NOVELLUS SYSTEMS INC39 citations95
US8043667B1Oct 25, 2011
Method to improve mechanical strength of low-K dielectric film using modulated UV exposure
NOVELLUS SYSTEMS INC18 citations92
US7622400B1Nov 24, 2009
Method for improving mechanical properties of low dielectric constant materials
NOVELLUS SYSTEMS INC42 citations92
US7473653B1Jan 6, 2009
Methods for producing low stress porous low-k dielectric materials using precursors with organic functional groups
NOVELLUS SYSTEMS INC12 citations92
US7781351B1Aug 24, 2010
Methods for producing low-k carbon doped oxide films with low residual stress
NOVELLUS SYSTEMS INC14 citations83
US7799705B1Sep 21, 2010
Methods for producing low stress porous low-k dielectric materials using precursors with organic functional groups
NOVELLUS SYSTEMS INC5 citations74
US6214526B1Apr 10, 2001
Semiconductor processing using antireflective layer having high wet etch rate
NOVELLUS SYSTEMS INC10 citations73