Inventor
GEGENWART RAINER
DE11 patents
⚠️ This page may combine multiple inventors who share the name “GEGENWART RAINER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEYBOLD AG
9 patentsUS5144196ASep 1, 1992
Particle source, especially for reactive ionic etching and plasma-supported CVD processes
LEYBOLD AG59 citations95
US5224202AJun 29, 1993
Apparatus for the evaporation of liquids
LEYBOLD AG53 citations93
US5334298AAug 2, 1994
Sputtering cathode
LEYBOLD AG26 citations92
US5423971AJun 13, 1995
Arrangement for coating substrates
LEYBOLD AG36 citations89
US5318928AJun 7, 1994
Method for the surface passivation of sensors using an in situ sputter cleaning step prior to passivation film deposition
LEYBOLD AG34 citations88
US4966677AOct 30, 1990
Cathode sputtering apparatus on the magnetron principle with a hollow cathode and a cylindrical target
LEYBOLD AG29 citations88
US5097794AMar 24, 1992
Apparatus for transporting substrates in a vacuum coating system
LEYBOLD AG19 citations73
US5237152AAug 17, 1993
Apparatus for thin-coating processes for treating substrates of great surface area
LEYBOLD AG9 citations71
US5498291AMar 12, 1996
Arrangement for coating or etching substrates
LEYBOLD AG2 citations60