Inventor
MICHAEL KLAUS
DE11 patents
⚠️ This page may combine multiple inventors who share the name “MICHAEL KLAUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEYBOLD AG
6 patentsUS4936329AJun 26, 1990
Device for cleaning, testing and sorting of workpieces
LEYBOLD AG97 citations94
US5423971AJun 13, 1995
Arrangement for coating substrates
LEYBOLD AG36 citations89
US5292419AMar 8, 1994
Sputtering unit
LEYBOLD AG35 citations89
US5097794AMar 24, 1992
Apparatus for transporting substrates in a vacuum coating system
LEYBOLD AG19 citations73
US5108789AApr 28, 1992
Method for manufacturing disk-shaped recording media
LEYBOLD AG10 citations72
US4936180AJun 26, 1990
Apparatus for machining workpieces, particularly flat circular disk-shaped substrates
LEYBOLD AG3 citations61
LEYBOLD SYSTEMS GMBH
5 patentsUS6196154B1Mar 6, 2001
Air lock for introducing substrates to and/or removing them from a treatment chamber
LEYBOLD SYSTEMS GMBH32 citations90
US6132562AOct 17, 2000
Method and device for transporting cylindrical substrates to be coated
LEYBOLD SYSTEMS GMBH38 citations90
US6187160B1Feb 13, 2001
Apparatus for the coating of substrates in a vacuum chamber
LEYBOLD SYSTEMS GMBH18 citations81
US6335054B1Jan 1, 2002
Air lock for introducing substrates to and/or removing them from a treatment chamber
LEYBOLD SYSTEMS GMBH8 citations71
US6206975B1Mar 27, 2001
Vacuum treatment system for application of thin, hard layers
LEYBOLD SYSTEMS GMBH7 citations70