Inventor
RITTER JOCHEN
DE8 patents
Patents
8 patentsUS5144196ASep 1, 1992
Particle source, especially for reactive ionic etching and plasma-supported CVD processes
LEYBOLD AG59 citations95
US5224202AJun 29, 1993
Apparatus for the evaporation of liquids
LEYBOLD AG53 citations93
US5423971AJun 13, 1995
Arrangement for coating substrates
LEYBOLD AG36 citations89
US5069930ADec 3, 1991
Method for the evaporation of monomers that are liquid at room temperature
LEYBOLD AG30 citations89
US4947789AAug 14, 1990
Apparatus for vaporizing monomers that flow at room temperature
LEYBOLD AG34 citations89
US5318928AJun 7, 1994
Method for the surface passivation of sensors using an in situ sputter cleaning step prior to passivation film deposition
LEYBOLD AG34 citations88
US5237152AAug 17, 1993
Apparatus for thin-coating processes for treating substrates of great surface area
LEYBOLD AG9 citations71
US5498291AMar 12, 1996
Arrangement for coating or etching substrates
LEYBOLD AG2 citations60