Inventor

VOLLRATH WOLFGANG

DE7 patents

⚠️ This page may combine multiple inventors who share the name “VOLLRATH WOLFGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEICA MICROSYSTEMS

2 patents

US6624930B1Sep 23, 2003

Illumination device for a DUV microscope and DUV microscope

LEICA MICROSYSTEMS24 citations90

US7375792B2May 20, 2008

Apparatus for measuring feature widths on masks for the semiconductor industry

LEICA MICROSYSTEMS0 citations40

KLA TENCOR CORP

1 patent

US9645097B2May 9, 2017

In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning

KLA TENCOR CORP10 citations80

BIRKNER ANDREAS

1 patent

US8089622B2Jan 3, 2012

Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafers

BIRKNER ANDREAS13 citations79

VISTEC SEMICONDUCTOR SYS GMBH

1 patent

US7268867B2Sep 11, 2007

Apparatus and method for inspecting a semiconductor component

VISTEC SEMICONDUCTOR SYS GMBH6 citations71

LEICA MIKROSKOPIE & SYST

1 patent

US5440422AAug 8, 1995

Method for manufacturing ultraviolet microscope dry objectives and microscope objectives manufactured in accordance with this method

LEICA MIKROSKOPIE & SYST7 citations71

HAHN KURT

1 patent

US8451440B2May 28, 2013

Apparatus for the optical inspection of wafers

HAHN KURT4 citations55