Inventor
HSU KUO-CHIN
TW3 patents
Patents
3 patentsUS5449639ASep 12, 1995
Disposable metal anti-reflection coating process used together with metal dry/wet etch
TAIWAN SEMICONDUCTOR MFG104 citations92
US6284642B1Sep 4, 2001
Integrated method of damascene and borderless via process
TAIWAN SEMICONDUCTOR MFG26 citations87
US5538914AJul 23, 1996
LDD method of coding mask ROM device and LDD coded mask ROM device produced thereby
TAIWAN SEMICONDUCTOR MFG18 citations65