Inventor
OKAMOTO SHIN
JP23 patents
⚠️ This page may combine multiple inventors who share the name “OKAMOTO SHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
14 patentsUS5595627AJan 21, 1997
Plasma etching method
TOKYO ELECTRON LTD171 citations98
US9496150B2Nov 15, 2016
Etching processing method
TOKYO ELECTRON LTD40 citations93
US5705081AJan 6, 1998
Etching method
TOKYO ELECTRON LTD24 citations92
US5721090AFeb 24, 1998
Method of etching a substrate
TOKYO ELECTRON LTD49 citations90
US7541283B2Jun 2, 2009
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD5 citations72
US6488863B2Dec 3, 2002
Plasma etching method
TOKYO ELECTRON LTD8 citations69
US7326650B2Feb 5, 2008
Method of etching dual damascene structure
TOKYO ELECTRON LTD6 citations62
US6589435B1Jul 8, 2003
Plasma etching method
TOKYO ELECTRON LTD5 citations62
US7799238B2Sep 21, 2010
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD3 citations61
US7119011B2Oct 10, 2006
Semiconductor device and manufacturing method thereof
TOKYO ELECTRON LTD2 citations61
US12548744B2Feb 10, 2026
Plasma processing apparatus, control method, and storage medium for suppressing deterioration effects from wear of an edge ring
TOKYO ELECTRON LTD0 citations57
US7300881B2Nov 27, 2007
Plasma etching method
TOKYO ELECTRON LTD1 citations49
US7622390B2Nov 24, 2009
Method for treating a dielectric film to reduce damage
TOKYO ELECTRON LTD0 citations45
US11495439B2Nov 8, 2022
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations44
NIPPON MEKTRON KK
3 patentsUS4943622AJul 24, 1990
Process for producing peroxide-vulcanizable, fluorine-containing elastomer
NIPPON MEKTRON KK161 citations98
US4920170AApr 24, 1990
Process for producing fluorine-containing elastic copolymer
NIPPON MEKTRON KK19 citations82
US4981918AJan 1, 1991
Crosslinkable, fluorine-containing elastomer composition
NIPPON MEKTRON KK2 citations63