Inventor

HATSUDA CHIAKI

JP2 patents

Patents

2 patents

US5811208ASep 22, 1998

Phase shift mask and method of producing the same

DAINIPPON PRINTING CO LTD24 citations91

US5972543AOct 26, 1999

Phase shift mask and method of producing the same

DAINIPPON PRINTING CO LTD11 citations72