Inventor
SCHINELLA RICHARD D
US9 patents
⚠️ This page may combine multiple inventors who share the name “SCHINELLA RICHARD D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
8 patentsUS6350700B1Feb 26, 2002
Process for forming trenches and vias in layers of low dielectric constant carbon-doped silicon oxide dielectric material of an integrated circuit structure
LSI LOGIC CORP59 citations96
US5827777AOct 27, 1998
Method of making a barrier metal technology for tungsten plug interconnection
LSI LOGIC CORP18 citations90
US5600182AFeb 4, 1997
Barrier metal technology for tungsten plug interconnection
LSI LOGIC CORP20 citations90
US5674774AOct 7, 1997
Method of making self-aligned remote polysilicon contacts
LSI LOGIC CORP18 citations83
US7020859B2Mar 28, 2006
Process skew results for integrated circuits
LSI LOGIC CORP13 citations82
US5652163AJul 29, 1997
Use of reticle stitching to provide design flexibility
LSI LOGIC CORP17 citations72
US6426286B1Jul 30, 2002
Interconnection system with lateral barrier layer
LSI LOGIC CORP0 citations41
US6518193B1Feb 11, 2003
Substrate processing system
LSI LOGIC CORP0 citations37