P

Inventor

KOJIMA MASAYUKI

JP78 patents
⚠️ This page may combine multiple inventors who share the name “KOJIMA MASAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

30 patents
US6090684AJul 18, 2000

Method for manufacturing semiconductor device

HITACHI LTD283 citations99
US6503794B1Jan 7, 2003

Semiconductor integrated circuit device and method for manufacturing the same

HITACHI LTD96 citations97
US5868854AFeb 9, 1999

Method and apparatus for processing samples

HITACHI LTD67 citations96
US6743673B2Jun 1, 2004

Semiconductor integrated circuitry and method for manufacturing the circuitry

HITACHI LTD64 citations95
US5734188AMar 31, 1998

Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same

HITACHI LTD73 citations95
US5445709AAug 29, 1995

Anisotropic etching method and apparatus

HITACHI LTD84 citations95
US6849191B2Feb 1, 2005

Method and apparatus for treating surface of semiconductor

HITACHI LTD24 citations92
US6677244B2Jan 13, 2004

Specimen surface processing method

HITACHI LTD18 citations92
US6660647B1Dec 9, 2003

Method for processing surface of sample

HITACHI LTD28 citations92
US6537415B2Mar 25, 2003

Apparatus for processing samples

HITACHI LTD17 citations92
US6436753B1Aug 20, 2002

Semiconductor integrated circuit and method for manufacturing the same

HITACHI LTD16 citations92
US5917211AJun 29, 1999

Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same

HITACHI LTD37 citations92
US5766498AJun 16, 1998

Anisotropic etching method and apparatus

HITACHI LTD31 citations92
US5264712ANov 23, 1993

Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same

HITACHI LTD27 citations92
US5188975AFeb 23, 1993

Method of producing a connection hole for a DRAM having at least three conductor layers in a self alignment manner.

HITACHI LTD38 citations92
US5661061AAug 26, 1997

Process for fabricating a semiconductor integrated circuit device having the multi-layered fin structure

HITACHI LTD48 citations91
US6833331B2Dec 21, 2004

Method of manufacturing semiconductor integrated circuit device having insulating film formed from liquid substance containing polymer of silicon, oxygen, and hydrogen

HITACHI LTD13 citations84
US6307217B1Oct 23, 2001

Semiconductor memory device having driver and load MISFETs and capacitor elements

HITACHI LTD15 citations83
US6156663ADec 5, 2000

Method and apparatus for plasma processing

HITACHI LTD16 citations82
US6509277B1Jan 21, 2003

Method of manufacturing semiconductor integrated circuit device having insulatro film formed from liquid containing polymer of silicon, oxygen, and hydrogen

HITACHI LTD10 citations74
US6403446B1Jun 11, 2002

Method for manufacturing semiconductor device

HITACHI LTD13 citations74
US6767838B1Jul 27, 2004

Method and apparatus for treating surface of semiconductor

HITACHI LTD11 citations73
US6720234B2Apr 13, 2004

Semiconductor integrated circuit device and method of manufacturing involving the scale-down width of shallow groove isolation using round processing

HITACHI LTD5 citations73
US6562695B1May 13, 2003

Semiconductor integrated circuit device and method of manufacturing involving the scale-down width of shallow groove isolation using round processing

HITACHI LTD12 citations73
US6537417B2Mar 25, 2003

Apparatus for processing samples

HITACHI LTD6 citations73
US6254721B1Jul 3, 2001

Method and apparatus for processing samples

HITACHI LTD6 citations73
US6191045B1Feb 20, 2001

Method of treating surface of sample

HITACHI LTD10 citations73
US6036816AMar 14, 2000

Apparatus for processing a sample having a metal laminate

HITACHI LTD8 citations73
US7259104B2Aug 21, 2007

Sample surface processing method

HITACHI LTD2 citations63
US6492277B1Dec 10, 2002

Specimen surface processing method and apparatus

HITACHI LTD4 citations63

NORITSU KOKI CO LTD

4 patents

HITACHI PLANT ENG & CONSTR CO

3 patents

TRINITY IND CORP

3 patents

RENESAS TECH CORP

2 patents

TOYOTA MOTOR CO LTD

2 patents

TOKYO ELECTRON LTD

1 patent

MITSUBISHI GAS CHEMICAL CO

1 patent

(unassigned)

1 patent

SEIKO INSTR & ELECTRONICS

1 patent

HITACHI ULSI SYS CO LTD

1 patent

OMRON TATEISI ELECTRONICS CO

1 patent

Showing the top 50 of 78 patents by PatentIndex Score.