Inventor
NOJIRI KAZUO
JP37 patents
⚠️ This page may combine multiple inventors who share the name “NOJIRI KAZUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
28 patentsUS6607988B2Aug 19, 2003
Manufacturing method of semiconductor integrated circuit device
HITACHI LTD53 citations96
US6451665B1Sep 17, 2002
Method of manufacturing a semiconductor integrated circuit
HITACHI LTD66 citations96
US6340632B1Jan 22, 2002
Method of manufacturing a semiconductor device
HITACHI LTD44 citations96
US6326218B1Dec 4, 2001
Semiconductor integrated circuit and its manufacturing method
HITACHI LTD46 citations96
US5868854AFeb 9, 1999
Method and apparatus for processing samples
HITACHI LTD67 citations96
US5007981AApr 16, 1991
Method of removing residual corrosive compounds by plasma etching followed by washing
HITACHI LTD106 citations96
US5734188AMar 31, 1998
Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same
HITACHI LTD73 citations95
US5646489AJul 8, 1997
Plasma generator with mode restricting means
HITACHI LTD43 citations93
US5433789AJul 18, 1995
Methods and apparatus for generating plasma, and semiconductor processing methods using mode restricted microwaves
HITACHI LTD22 citations93
US6555464B2Apr 29, 2003
Semiconductor device and method of manufacturing the same
HITACHI LTD25 citations92
US6537415B2Mar 25, 2003
Apparatus for processing samples
HITACHI LTD17 citations92
US6432835B1Aug 13, 2002
Process for fabricating an integrated circuit device having a capacitor with an electrode formed at a high aspect ratio
HITACHI LTD25 citations92
US5917211AJun 29, 1999
Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same
HITACHI LTD37 citations92
US5264712ANov 23, 1993
Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same
HITACHI LTD27 citations92
US5200017AApr 6, 1993
Sample processing method and apparatus
HITACHI LTD38 citations92
US6186153B1Feb 13, 2001
Plasma treatment method and manufacturing method of semiconductor device
HITACHI LTD25 citations91
US5661061AAug 26, 1997
Process for fabricating a semiconductor integrated circuit device having the multi-layered fin structure
HITACHI LTD48 citations91
US6528400B2Mar 4, 2003
Method of manufacturing a semiconductor device
HITACHI LTD8 citations74
US5952245ASep 14, 1999
Method for processing samples
HITACHI LTD7 citations74
US6537417B2Mar 25, 2003
Apparatus for processing samples
HITACHI LTD6 citations73
US6254721B1Jul 3, 2001
Method and apparatus for processing samples
HITACHI LTD6 citations73
US6191045B1Feb 20, 2001
Method of treating surface of sample
HITACHI LTD10 citations73
US6036816AMar 14, 2000
Apparatus for processing a sample having a metal laminate
HITACHI LTD8 citations73
US6077788AJun 20, 2000
Method and apparatus for processing samples
HITACHI LTD5 citations63
US6989228B2Jan 24, 2006
Method and apparatus for processing samples
HITACHI LTD3 citations62
US6656846B2Dec 2, 2003
Apparatus for processing samples
HITACHI LTD2 citations62
US6656752B1Dec 2, 2003
Ion current density measuring method and instrument, and semiconductor device manufacturing method
HITACHI LTD5 citations62
US7132293B2Nov 7, 2006
Method and apparatus for processing samples
HITACHI LTD1 citations52
LAM RES CORP
3 patentsRENESAS TECH CORP
3 patentsUS6774020B2Aug 10, 2004
Semiconductor device and method of manufacturing the same
RENESAS TECH CORP4 citations74
US7419902B2Sep 2, 2008
Method of manufacture of semiconductor integrated circuit
RENESAS TECH CORP8 citations72
US7737023B2Jun 15, 2010
Method of manufacture of semiconductor integrated circuit device and semiconductor integrated circuit device
RENESAS TECH CORP5 citations61
MATSUSHITA GRAPHIC COMMUNIC
3 patentsUS5822081AOct 13, 1998
Facsimile apparatus with improved network control and power supply section arrangement
MATSUSHITA GRAPHIC COMMUNIC10 citations72
US5568277AOct 22, 1996
Facsimile apparatus with improved control board arrangement
MATSUSHITA GRAPHIC COMMUNIC3 citations61
US5452110ASep 19, 1995
Compact facsimile apparatus with improved component arrangement
MATSUSHITA GRAPHIC COMMUNIC4 citations61