Inventor
SCHOEFTHALER MARTIN
DE5 patents
Patents
5 patentsUS6520017B1Feb 18, 2003
Micromechanical spin angular acceleration sensor
BOSCH GMBH ROBERT142 citations96
US6360605B1Mar 26, 2002
Micromechanical device
BOSCH GMBH ROBERT73 citations94
US6215318B1Apr 10, 2001
Micromechanical magnetic field sensor
BOSCH GMBH ROBERT66 citations92
US6462566B1Oct 8, 2002
Sensor element
BOSCH GMBH ROBERT31 citations90
US6656368B2Dec 2, 2003
Nonstick layer for a micromechanical component
BOSCH GMBH ROBERT4 citations61