P

Inventor

EMMERICH HARALD

DE12 patents
⚠️ This page may combine multiple inventors who share the name “EMMERICH HARALD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BOSCH GMBH ROBERT

6 patents
US6520017B1Feb 18, 2003

Micromechanical spin angular acceleration sensor

BOSCH GMBH ROBERT142 citations96
US6462392B1Oct 8, 2002

Micromechanical cap structure and the respective manufacturing method

BOSCH GMBH ROBERT27 citations92
US6215318B1Apr 10, 2001

Micromechanical magnetic field sensor

BOSCH GMBH ROBERT66 citations92
US6462566B1Oct 8, 2002

Sensor element

BOSCH GMBH ROBERT31 citations90
US7323766B2Jan 29, 2008

Sensor module

BOSCH GMBH ROBERT11 citations82
US7555929B2Jul 7, 2009

Micromechanical sensor having fault identification

BOSCH GMBH ROBERT6 citations60

WISCONSIN ALUMNI RES FOUND

2 patents
US5866281AFeb 2, 1999

Alignment method for multi-level deep x-ray lithography utilizing alignment holes and posts

WISCONSIN ALUMNI RES FOUND136 citations98
US5908719AJun 1, 1999

Radiation mask adapted to be aligned with a photoresist layer and method of making the same

WISCONSIN ALUMNI RES FOUND88 citations95

HOLZMANN MARTIN

1 patent
US8426930B2Apr 23, 2013

Sensor module

HOLZMANN MARTIN7 citations76

KAACK ROLF

1 patent
US9239339B2Jan 19, 2016

Acceleration sensor and method for operating an acceleration sensor

KAACK ROLF2 citations53

ULM MARKUS

1 patent
US8786419B2Jul 22, 2014

Method for controlling a device and a device for controlling the device

ULM MARKUS0 citations45

REINMUTH JOCHEN

1 patent
US8752431B2Jun 17, 2014

Acceleration sensor method for operating an acceleration sensor

REINMUTH JOCHEN0 citations41