Inventor
CHEN GIM-SYANG
US9 patents
⚠️ This page may combine multiple inventors who share the name “CHEN GIM-SYANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AKRION LLC
4 patentsUS6837944B2Jan 4, 2005
Cleaning and drying method and apparatus
AKRION LLC24 citations89
US6626189B2Sep 30, 2003
Method of processing substrates using pressurized mist generation
AKRION LLC13 citations82
US6532974B2Mar 18, 2003
Process tank with pressurized mist generation
AKRION LLC13 citations82
US6818563B2Nov 16, 2004
Process and apparatus for removal of photoresist from semiconductor wafers using spray nozzles
AKRION LLC4 citations61