Inventor
YANG SEN-SHAN
TW5 patents
⚠️ This page may combine multiple inventors who share the name “YANG SEN-SHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS6649077B2Nov 18, 2003
Method and apparatus for removing coating layers from alignment marks on a wafer
TAIWAN SEMICONDUCTOR MFG21 citations92
US6604853B2Aug 12, 2003
Accelerated thermal stress cycle test
TAIWAN SEMICONDUCTOR MFG22 citations86
US6855648B2Feb 15, 2005
Method of reducing stress migration in integrated circuits
TAIWAN SEMICONDUCTOR MFG4 citations61
US6693365B2Feb 17, 2004
Local electrochemical deplating of alignment mark regions of semiconductor wafers
TAIWAN SEMICONDUCTOR MFG2 citations61