Inventor
TSUKAMOTO IZUMI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “TSUKAMOTO IZUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
7 patentsUS6762826B2Jul 13, 2004
Substrate attracting and holding system for use in exposure apparatus
CANON KK80 citations97
US6809802B1Oct 26, 2004
Substrate attracting and holding system for use in exposure apparatus
CANON KK70 citations95
US5760879AJun 2, 1998
Method of detecting coma of projection optical system
CANON KK30 citations92
US6633390B2Oct 14, 2003
Focus measurement in projection exposure apparatus
CANON KK31 citations89
US6654096B1Nov 25, 2003
Exposure apparatus, and device manufacturing method
CANON KK17 citations83
US4538914ASep 3, 1985
Transfer apparatus for compensating for a transfer error
CANON KK25 citations80
US7755740B2Jul 13, 2010
Exposure apparatus
CANON KK6 citations62