Inventor
TAKABAYASHI YUKIO
JP25 patents
⚠️ This page may combine multiple inventors who share the name “TAKABAYASHI YUKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
24 patentsUS5923408AJul 13, 1999
Substrate holding system and exposure apparatus using the same
CANON KK184 citations99
US6307620B1Oct 23, 2001
Substrate holding apparatus, substrate transfer system, exposure apparatus, coating apparatus, method for making a device, and method for cleaning a substrate holding section
CANON KK109 citations98
US6762826B2Jul 13, 2004
Substrate attracting and holding system for use in exposure apparatus
CANON KK80 citations97
US6266133B1Jul 24, 2001
Stage device, an exposure apparatus and a device manufacturing method using the same
CANON KK84 citations97
US6322060B1Nov 27, 2001
Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration method
CANON KK81 citations96
US6809802B1Oct 26, 2004
Substrate attracting and holding system for use in exposure apparatus
CANON KK70 citations95
US6493062B2Dec 10, 2002
Driving apparatus and exposure apparatus
CANON KK61 citations95
US5187519AFeb 16, 1993
Exposure apparatus having mount means to suppress vibrations
CANON KK87 citations95
US6583859B2Jun 24, 2003
Stage device, an exposure apparatus and a device manufacturing method using the same
CANON KK35 citations92
US6208408B1Mar 27, 2001
Projection exposure apparatus and device manufacturing method
CANON KK38 citations92
US5691806ANov 25, 1997
Projection exposure apparatus containing an enclosed hollow structure
CANON KK28 citations92
US7161750B2Jan 9, 2007
Retainer, exposure apparatus, and device fabrication method
CANON KK10 citations84
US6654096B1Nov 25, 2003
Exposure apparatus, and device manufacturing method
CANON KK17 citations83
US7425238B2Sep 16, 2008
Substrate holding device
CANON KK13 citations79
US7253975B2Aug 7, 2007
Retainer, exposure apparatus, and device fabrication method
CANON KK7 citations74
US6990386B2Jan 24, 2006
Moving mechanism and stage system in exposure apparatus
CANON KK6 citations74
US9770850B2Sep 26, 2017
Imprint apparatus and article manufacturing method
CANON KK2 citations73
US6965428B2Nov 15, 2005
Stage apparatus, exposure apparatus, and semiconductor device manufacturing method
CANON KK5 citations60
US7352520B2Apr 1, 2008
Holding device and exposure apparatus using the same
CANON KK3 citations59
US7346414B2Mar 18, 2008
Moving mechanism and stage system in exposure apparatus
CANON KK0 citations52
US10112324B2Oct 30, 2018
Imprint method, imprint apparatus, and production method for article
CANON KK1 citations51
US9952504B2Apr 24, 2018
Imprint method, imprint apparatus, and method for manufacturing device
CANON KK1 citations51
US9339970B2May 17, 2016
Imprint apparatus, and article manufacturing method
CANON KK0 citations44
US10331027B2Jun 25, 2019
Imprint apparatus, imprint system, and method of manufacturing article
CANON KK0 citations42