Inventor
STOW CLIFFORD C
US8 patents
⚠️ This page may combine multiple inventors who share the name “STOW CLIFFORD C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS6902628B2Jun 7, 2005
Method of cleaning a coated process chamber component
APPLIED MATERIALS INC41 citations92
US6713188B2Mar 30, 2004
Clean aluminum alloy for semiconductor processing equipment
APPLIED MATERIALS INC27 citations92
US6659331B2Dec 9, 2003
Plasma-resistant, welded aluminum structures for use in semiconductor apparatus
APPLIED MATERIALS INC30 citations92
US7048814B2May 23, 2006
Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus
APPLIED MATERIALS INC16 citations83
US6899798B2May 31, 2005
Reusable ceramic-comprising component which includes a scrificial surface layer
APPLIED MATERIALS INC18 citations80
US7033447B2Apr 25, 2006
Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus
APPLIED MATERIALS INC8 citations73
US7055732B2Jun 6, 2006
Semiconductor processing apparatus including plasma-resistant, welded aluminum structures
APPLIED MATERIALS INC4 citations62