Inventor
HARRISON DALE A
US43 patents
⚠️ This page may combine multiple inventors who share the name “HARRISON DALE A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
METROSOL INC
18 patentsUS7067818B2Jun 27, 2006
Vacuum ultraviolet reflectometer system and method
METROSOL INC67 citations98
US7126131B2Oct 24, 2006
Broad band referencing reflectometer
METROSOL INC52 citations96
US7684037B2Mar 23, 2010
Spectrometer with collimated input light
METROSOL INC28 citations92
US7485869B2Feb 3, 2009
Prism spectrometer
METROSOL INC28 citations92
US7446876B2Nov 4, 2008
Vacuum ultra-violet reflectometer with stray light correction
METROSOL INC11 citations92
US7399975B2Jul 15, 2008
Method and apparatus for performing highly accurate thin film measurements
METROSOL INC19 citations92
US7394551B2Jul 1, 2008
Vacuum ultraviolet referencing reflectometer
METROSOL INC25 citations92
US7391030B2Jun 24, 2008
Broad band referencing reflectometer
METROSOL INC19 citations92
US7271394B2Sep 18, 2007
Vacuum ultraviolet reflectometer having collimated beam
METROSOL INC19 citations92
US7189973B2Mar 13, 2007
Vacuum ultraviolet reflectometer integrated with processing system
METROSOL INC26 citations92
US7026626B2Apr 11, 2006
Semiconductor processing techniques utilizing vacuum ultraviolet reflectometer
METROSOL INC38 citations92
US7342235B1Mar 11, 2008
Contamination monitoring and control techniques for use with an optical metrology instrument
METROSOL INC32 citations91
US7511265B2Mar 31, 2009
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement
METROSOL INC11 citations84
US7282703B2Oct 16, 2007
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement
METROSOL INC17 citations84
US7579601B2Aug 25, 2009
Spectrometer with moveable detector element
METROSOL INC16 citations83
US7663097B2Feb 16, 2010
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement
METROSOL INC4 citations62
US7663747B2Feb 16, 2010
Contamination monitoring and control techniques for use with an optical metrology instrument
METROSOL INC2 citations61
US7622310B2Nov 24, 2009
Contamination monitoring and control techniques for use with an optical metrology instrument
METROSOL INC2 citations61
VUV ANALYTICS INC
9 patentsUS9116158B2Aug 25, 2015
Vacuum ultraviolet absorption spectroscopy system and method
VUV ANALYTICS INC13 citations91
US10641749B2May 5, 2020
Vacuum ultraviolet absorption spectroscopy system and method
VUV ANALYTICS INC3 citations83
US10677767B2Jun 9, 2020
Vacuum ultraviolet absorption spectroscopy system and method
VUV ANALYTICS INC3 citations72
US9976996B2May 22, 2018
Vacuum ultraviolet absorption spectroscopy system and method
VUV ANALYTICS INC2 citations72
US12535408B2Jan 27, 2026
Spectroscopy systems and methods for analyzing liquids at vacuum ultraviolet (VUV) wavelengths
VUV ANALYTICS INC0 citations51
US10338040B2Jul 2, 2019
Vacuum ultraviolet absorption spectroscopy system and method
VUV ANALYTICS INC0 citations51
US9891197B2Feb 13, 2018
Vacuum ultraviolet absorption spectroscopy system and method
VUV ANALYTICS INC0 citations51
US9696286B2Jul 4, 2017
Vacuum ultraviolet absorption spectroscopy system and method
VUV ANALYTICS INC0 citations51
US10302607B2May 28, 2019
Method for detailed and bulk classification analysis of complex samples using vacuum ultra-violet spectroscopy and gas chromatography
VUV ANALYTICS INC0 citations34
N & K TECHNOLOGY INC
6 patentsUS6392756B1May 21, 2002
Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrate
N & K TECHNOLOGY INC123 citations97
US6091485AJul 18, 2000
Method and apparatus for optically determining physical parameters of underlayers
N & K TECHNOLOGY INC78 citations96
US6379014B1Apr 30, 2002
Graded anti-reflective coatings for photolithography
N & K TECHNOLOGY INC26 citations92
US6327035B1Dec 4, 2001
Method and apparatus for optically examining miniature patterns
N & K TECHNOLOGY INC53 citations92
US6710865B2Mar 23, 2004
Method of inferring optical parameters outside of a measurement spectral range
N & K TECHNOLOGY INC39 citations88
US6594025B2Jul 15, 2003
Method of monitoring thin-film processes and metrology tool thereof
N & K TECHNOLOGY INC24 citations88
JORDAN VALLEY SEMICONDUCTORS
3 patentsUS8054453B2Nov 8, 2011
Broad band referencing reflectometer
JORDAN VALLEY SEMICONDUCTORS15 citations92
US7804059B2Sep 28, 2010
Method and apparatus for accurate calibration of VUV reflectometer
JORDAN VALLEY SEMICONDUCTORS12 citations84
US8014000B2Sep 6, 2011
Broad band referencing reflectometer
JORDAN VALLEY SEMICONDUCTORS3 citations74