Inventor
FUKAGAWA YOUZOU
JP15 patents
⚠️ This page may combine multiple inventors who share the name “FUKAGAWA YOUZOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
11 patentsUS5684856ANov 4, 1997
Stage device and pattern transfer system using the same
CANON KK133 citations97
US6081319AJun 27, 2000
Illumination system and scan type exposure apparatus
CANON KK45 citations92
US7346886B2Mar 18, 2008
Method and apparatus for determining chip arrangement position on substrate
CANON KK9 citations81
US7301615B2Nov 27, 2007
Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method
CANON KK14 citations81
US7230692B2Jun 12, 2007
Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method
CANON KK9 citations71
US7084957B2Aug 1, 2006
Scanning exposure technique
CANON KK6 citations62
US6947119B2Sep 20, 2005
Distortion measurement method and exposure apparatus
CANON KK6 citations62
US6854105B2Feb 8, 2005
Chip arrangement determining apparatus and method
CANON KK5 citations62
US5878068AMar 2, 1999
Energy quantity control method
CANON KK4 citations61
US7894039B2Feb 22, 2011
Exposure apparatus and method, and device manufacturing method
CANON KK2 citations53
US9310695B2Apr 12, 2016
Exposure apparatus, method of obtaining amount of regulation of object to be regulated, program, and method of manufacturing article
CANON KK0 citations38