Inventor

MENAGARISHVILI VLADIMIR M

JP2 patents

Patents

2 patents

US9137884B2Sep 15, 2015

Apparatus and method for plasma processing

VINOGRADOV GEORGY K21 citations85

US8247977B2Aug 21, 2012

Induction coil, a plasma generator and a plasma generating method

VINOGRADOV GEORGY K5 citations54