Inventor
RANGARAJAN VISHWANATHAN
US12 patents
⚠️ This page may combine multiple inventors who share the name “RANGARAJAN VISHWANATHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
4 patentsUS8999859B2Apr 7, 2015
Plasma activated conformal dielectric film deposition
NOVELLUS SYSTEMS INC56 citations96
US10043655B2Aug 7, 2018
Plasma activated conformal dielectric film deposition
NOVELLUS SYSTEMS INC28 citations93
US9570274B2Feb 14, 2017
Plasma activated conformal dielectric film deposition
NOVELLUS SYSTEMS INC30 citations93
US8846525B2Sep 30, 2014
Hardmask materials
NOVELLUS SYSTEMS INC21 citations92
ANTONELLI GEORGE ANDREW
4 patentsUS8288292B2Oct 16, 2012
Depositing conformal boron nitride film by CVD without plasma
ANTONELLI GEORGE ANDREW16 citations92
US8217513B2Jul 10, 2012
Remote plasma processing of interface surfaces
ANTONELLI GEORGE ANDREW24 citations91
US8084339B2Dec 27, 2011
Remote plasma processing of interface surfaces
ANTONELLI GEORGE ANDREW29 citations91
US8479683B2Jul 9, 2013
Apparatus including a plasma chamber and controller including instructions for forming a boron nitride layer
ANTONELLI GEORGE ANDREW4 citations62