Inventor

EHRMANN ALBRECHT

DE20 patents

⚠️ This page may combine multiple inventors who share the name “EHRMANN ALBRECHT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EHRMANN ALBRECHT

ZEISS CARL SMT GMBH

Apparatus for determining an optical property of an optical imaging system

Exposure apparatus and measuring device for a projection lens

Microlithographic projection exposure apparatus and measuring device for a projection lens

Device and method for the optical measurement of an optical system by using an immersion fluid

System for measuring the image quality of an optical imaging system

System for measuring the image quality of an optical imaging system

Measurement apparatus for measuring a wavefront aberration of an imaging optical system

INFINEON TECHNOLOGIES AG

Large-area membrane mask and method for fabricating the mask

Method for fabricating positionally exact surface-wide membrane masks

Method of producing large-area membrane masks by dry etching

Method of producing a perforated mask for particle radiation

Lithography mask configuration

ZEISS CARL SMT AG

System for measuring the image quality of an optical imaging system

System for measuring the image quality of an optical imaging system

Device and method for the optical measurement of an optical system by using an immersion fluid

DODOC AURELIAN

Optical system of a microlithographic projection exposure apparatus

WEGMANN ULRICH

Device and method for the optical measurement of an optical system by using an immersion fluid

MENGEL MARKUS

System for measuring the image quality of an optical imaging system

EHRMANN ALBRECHT

Exposure apparatus and measuring device for a projection lens

DOCK 1 AG

Goods transfer station and process for operating such a goods transfer station