Inventor

MALLMANN JOERG

DE5 patents

⚠️ This page may combine multiple inventors who share the name “MALLMANN JOERG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

2 patents

US7532306B2May 12, 2009

Microlithographic projection exposure apparatus

ZEISS CARL SMT AG17 citations92

US7570343B2Aug 4, 2009

Microlithographic projection exposure apparatus

ZEISS CARL SMT AG14 citations83

ZEISS CARL SMT GMBH

2 patents

US9436095B2Sep 6, 2016

Exposure apparatus and measuring device for a projection lens

ZEISS CARL SMT GMBH1 citations62

US10345710B2Jul 9, 2019

Microlithographic projection exposure apparatus and measuring device for a projection lens

ZEISS CARL SMT GMBH0 citations51

EHRMANN ALBRECHT

1 patent

US8330935B2Dec 11, 2012

Exposure apparatus and measuring device for a projection lens

EHRMANN ALBRECHT2 citations56