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Inventor
CHUNG TAE MARK H
US
3 patents
⚠️ This page may combine multiple inventors who share the name “CHUNG TAE MARK H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SANDSTROM RICHARD L
2 patents
US8526481B2
Sep 3, 2013
Extendable electrode for gas discharge laser
SANDSTROM RICHARD L
2 citations
60
US8446928B2
May 21, 2013
Extendable electrode for gas discharge laser
SANDSTROM RICHARD L
2 citations
60
CYMER INC
1 patent
US7856044B2
Dec 21, 2010
Extendable electrode for gas discharge laser
CYMER INC
15 citations
91