Inventor
HIENO ATSUSHI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “HIENO ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
5 patentsUS9177818B2Nov 3, 2015
Pattern formation method and block copolymer
TOSHIBA KK7 citations83
US10147612B2Dec 4, 2018
Metal pattern forming method
TOSHIBA KK1 citations51
US9659816B2May 23, 2017
Pattern forming method
TOSHIBA KK1 citations51
US9291908B2Mar 22, 2016
Method of forming pattern and laminate
TOSHIBA KK0 citations51
US9608203B2Mar 28, 2017
Method for manufacturing memory device and method for manufacturing metal wiring
TOSHIBA KK0 citations40