Inventor
VALENTIN CHRISTIAAN LOUIS
NL10 patents
⚠️ This page may combine multiple inventors who share the name “VALENTIN CHRISTIAAN LOUIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS10747127B2Aug 18, 2020
Lithographic apparatus
ASML NETHERLANDS BV5 citations68
US8368868B2Feb 5, 2013
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless
ASML NETHERLANDS BV2 citations62
US10228626B2Mar 12, 2019
Movable support and lithographic apparatus
ASML NETHERLANDS BV1 citations61
US10248027B2Apr 2, 2019
Projection system
ASML NETHERLANDS BV1 citations56
US11681233B2Jun 20, 2023
Gas mixing for fast temperature control of a cooling hood
ASML NETHERLANDS BV0 citations53
US9910368B2Mar 6, 2018
Patterning device manipulating system and lithographic apparatuses
ASML NETHERLANDS BV0 citations47
US11442369B2Sep 13, 2022
Object stage bearing for lithographic apparatus
ASML NETHERLANDS BV0 citations43
US9958787B2May 1, 2018
Lithographic method and apparatus
ASML NETHERLANDS BV0 citations40