Inventor
MUNNIG SCHMIDT ROBERT-HAN
NL20 patents
⚠️ This page may combine multiple inventors who share the name “MUNNIG SCHMIDT ROBERT-HAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
16 patentsUS7359032B2Apr 15, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV17 citations90
US6498350B2Dec 24, 2002
Crash prevention in positioning apparatus for use in lithographic projection apparatus
ASML NETHERLANDS BV32 citations88
US7242458B2Jul 10, 2007
Lithographic apparatus and device manufacturing method utilizing a multiple substrate carrier for flat panel display substrates
ASML NETHERLANDS BV12 citations83
US7202939B2Apr 10, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations74
US7248339B2Jul 24, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations73
US7016020B2Mar 21, 2006
Positioning device
ASML NETHERLANDS BV8 citations73
US7567338B2Jul 28, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations63
US7110086B2Sep 19, 2006
Movable stage system, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV6 citations63
US8368868B2Feb 5, 2013
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless
ASML NETHERLANDS BV2 citations62
US7728955B2Jun 1, 2010
Lithographic apparatus, radiation supply and device manufacturing method
ASML NETHERLANDS BV5 citations62
US7342644B2Mar 11, 2008
Methods and systems for lithographic beam generation
ASML NETHERLANDS BV4 citations62
US7006199B2Feb 28, 2006
Lithographic positioning device and device manufacturing method
ASML NETHERLANDS BV3 citations62
US7423730B2Sep 9, 2008
Lithographic apparatus
ASML NETHERLANDS BV4 citations60
US7016016B2Mar 21, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations59
US7679720B2Mar 16, 2010
Apparatus configured to position a workpiece
ASML NETHERLANDS BV0 citations48
US7612867B2Nov 3, 2009
Lithographic apparatus
ASML NETHERLANDS BV0 citations48