Inventor
CHI LIANG-CHEN
TW7 patents
⚠️ This page may combine multiple inventors who share the name “CHI LIANG-CHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS9876083B2Jan 23, 2018
Semiconductor devices, FinFET devices and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations83
US9312138B2Apr 12, 2016
Method for forming gate dielectric layer
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US9064865B2Jun 23, 2015
Mechanisms for forming gate dielectric layer
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations61
US9196718B2Nov 24, 2015
In-situ nitridation of gate dielectric for semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
TAIWAN SEMICONDUCTOR MFG
3 patentsUS8729645B2May 20, 2014
Substrate backside peeling control
TAIWAN SEMICONDUCTOR MFG0 citations47
US8946036B2Feb 3, 2015
Method of forming dielectric films using a plurality of oxidation gases
TAIWAN SEMICONDUCTOR MFG1 citations45
US9306024B2Apr 5, 2016
Method of forming semiconductor device
TAIWAN SEMICONDUCTOR MFG0 citations40