Inventor
PELLEMANS HENRICUS PETRUS MARIA
NL30 patents
⚠️ This page may combine multiple inventors who share the name “PELLEMANS HENRICUS PETRUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
24 patentsUS7791732B2Sep 7, 2010
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV80 citations98
US8760662B2Jun 24, 2014
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV16 citations92
US8054467B2Nov 8, 2011
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV15 citations92
US8921814B2Dec 30, 2014
Photon source, metrology apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV28 citations90
US11360399B2Jun 14, 2022
Metrology sensor for position metrology
ASML NETHERLANDS BV10 citations85
US11307024B2Apr 19, 2022
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV3 citations84
US10591283B2Mar 17, 2020
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV3 citations84
US10209061B2Feb 19, 2019
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9933250B2Apr 3, 2018
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV5 citations84
US9128065B2Sep 8, 2015
Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method
ASML NETHERLANDS BV5 citations84
US10241055B2Mar 26, 2019
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV3 citations83
US9158194B2Oct 13, 2015
Metrology method and apparatus, and device manufacturing method
ASML NETHERLANDS BV9 citations83
US9753379B2Sep 5, 2017
Inspection apparatus and methods, methods of manufacturing devices
ASML NETHERLANDS BV7 citations82
US9357626B2May 31, 2016
Photon source, metrology apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV7 citations82
US7440079B2Oct 21, 2008
Lithographic apparatus, alignment system, and device manufacturing method
ASML NETHERLANDS BV10 citations81
US11828585B2Nov 28, 2023
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV2 citations73
US10955353B2Mar 23, 2021
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV2 citations73
US12025925B2Jul 2, 2024
Metrology method and lithographic apparatuses
ASML NETHERLANDS BV6 citations72
US12235096B2Feb 25, 2025
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV0 citations62
US11525786B2Dec 13, 2022
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV0 citations62
US11428925B2Aug 30, 2022
Position metrology apparatus and associated optical elements
ASML NETHERLANDS BV0 citations61
US7869022B2Jan 11, 2011
Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring system
ASML NETHERLANDS BV4 citations57
US11372343B2Jun 28, 2022
Alignment method and associated metrology device
ASML NETHERLANDS BV0 citations56
US9921489B2Mar 20, 2018
Focus monitoring arrangement and inspection apparatus including such an arrangement
ASML NETHERLANDS BV0 citations50