Inventor
KRIVTSUN VLADIMIR MIHAILOVITCH
RU24 patents
⚠️ This page may combine multiple inventors who share the name “KRIVTSUN VLADIMIR MIHAILOVITCH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
14 patentsUS8921814B2Dec 30, 2014
Photon source, metrology apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV28 citations90
US7061574B2Jun 13, 2006
Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV11 citations84
US9357626B2May 31, 2016
Photon source, metrology apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV7 citations82
US7528395B2May 5, 2009
Radiation source, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations80
US9411238B2Aug 9, 2016
Source-collector device, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV4 citations72
US7372058B2May 13, 2008
Ex-situ removal of deposition on an optical element
ASML NETHERLANDS BV8 citations70
US7557366B2Jul 7, 2009
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV2 citations62
US7518134B2Apr 14, 2009
Plasma radiation source for a lithographic apparatus
ASML NETHERLANDS BV6 citations62
US7696492B2Apr 13, 2010
Radiation system and lithographic apparatus
ASML NETHERLANDS BV6 citations61
US7462851B2Dec 9, 2008
Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV5 citations61
US7767989B2Aug 3, 2010
Ex-situ removal of deposition on an optical element
ASML NETHERLANDS BV1 citations60
US7772570B2Aug 10, 2010
Assembly for blocking a beam of radiation and method of blocking a beam of radiation
ASML NETHERLANDS BV0 citations51
US7872244B2Jan 18, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations49
US7335900B2Feb 26, 2008
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV0 citations49
YAKUNIN ANDREI MIKHAILOVICH
3 patentsBANINE VADIM YEVGENYEVICH
3 patentsUS8598550B2Dec 3, 2013
Ex-situ removal of deposition on an optical element
BANINE VADIM YEVGENYEVICH0 citations50
US8134136B2Mar 13, 2012
Ex-situ removal of deposition on an optical element
BANINE VADIM YEVGENYEVICH0 citations50
US9411250B2Aug 9, 2016
Radiation system and lithographic apparatus
BANINE VADIM YEVGENYEVICH0 citations41