Inventor
DE WIT JOHANNES MATHEUS MARIE
NL8 patents
⚠️ This page may combine multiple inventors who share the name “DE WIT JOHANNES MATHEUS MARIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS8921814B2Dec 30, 2014
Photon source, metrology apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV28 citations90
US9357626B2May 31, 2016
Photon source, metrology apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV7 citations82
US10303064B2May 28, 2019
Radiation conditioning system, illumination system and metrology apparatus, device manufacturing method
ASML NETHERLANDS BV2 citations68
US10416567B2Sep 17, 2019
Illumination system and metrology system
ASML NETHERLANDS BV2 citations67
US10234767B2Mar 19, 2019
Device and method for processing a radiation beam with coherence
ASML NETHERLANDS BV1 citations62
US10495889B2Dec 3, 2019
Beam homogenizer, illumination system and metrology system
ASML NETHERLANDS BV0 citations51