Inventor
SMEETS RALPH JOZEF JOHANNES GERARDUS ANNA MARIA
NL3 patents
Patents
3 patentsUS8921814B2Dec 30, 2014
Photon source, metrology apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV28 citations90
US9357626B2May 31, 2016
Photon source, metrology apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV7 citations82
US10948421B2Mar 16, 2021
Laser-driven photon source and inspection apparatus including such a laser-driven photon source
ASML NETHERLANDS BV0 citations55