Inventor
THADANI KIRAN V
US9 patents
⚠️ This page may combine multiple inventors who share the name “THADANI KIRAN V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS9412581B2Aug 9, 2016
Low-K dielectric gapfill by flowable deposition
APPLIED MATERIALS INC396 citations98
US9362107B2Jun 7, 2016
Flowable low-k dielectric gapfill treatment
APPLIED MATERIALS INC430 citations98
US8889566B2Nov 18, 2014
Low cost flowable dielectric films
APPLIED MATERIALS INC9 citations83
US8921235B2Dec 30, 2014
Controlled air gap formation
APPLIED MATERIALS INC2 citations62
US9583332B2Feb 28, 2017
Low temperature cure modulus enhancement
APPLIED MATERIALS INC1 citations52
US9318383B2Apr 19, 2016
Integrated cluster to enable next generation interconnect
APPLIED MATERIALS INC0 citations52
US9184093B2Nov 10, 2015
Integrated cluster to enable next generation interconnect
APPLIED MATERIALS INC0 citations52
US9896326B2Feb 20, 2018
FCVD line bending resolution by deposition modulation
APPLIED MATERIALS INC0 citations41