Inventor

JI LINAN

CN9 patents

⚠️ This page may combine multiple inventors who share the name “JI LINAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

4 patents

US7749909B2Jul 6, 2010

Method of treating a semiconductor substrate

TOSHIBA KK46 citations94

US7838425B2Nov 23, 2010

Method of treating surface of semiconductor substrate

TOSHIBA KK27 citations92

US7985683B2Jul 26, 2011

Method of treating a semiconductor substrate

TOSHIBA KK13 citations91

US9570286B2Feb 14, 2017

Supercritical drying method for semiconductor substrate

TOSHIBA KK1 citations52

JI LINAN

1 patent

US8771429B2Jul 8, 2014

Supercritical drying method for semiconductor substrate and supercritical drying apparatus

JI LINAN5 citations79

TOKYO ELECTRON LTD

1 patent

US9583330B2Feb 28, 2017

Supercritical drying method for semiconductor substrate and supercritical drying apparatus

TOKYO ELECTRON LTD2 citations73

SATO YOHEI

1 patent

US8950082B2Feb 10, 2015

Supercritical drying method for semiconductor substrate

SATO YOHEI3 citations60

INUKAI MINAKO

1 patent

US8567420B2Oct 29, 2013

Cleaning apparatus for semiconductor wafer

INUKAI MINAKO3 citations56

TOMITA HIROSHI

1 patent

US8961696B2Feb 24, 2015

Method and device for cleaning semiconductor substrate

TOMITA HIROSHI0 citations50