Inventor
GODDARD SHAWN R
US3 patents
Patents
3 patentsUS7627622B2Dec 1, 2009
System and method of curve fitting
IBM80 citations94
US9576863B2Feb 21, 2017
Method of fine-tuning process controls during integrated circuit chip manufacturing based on substrate backside roughness
IBM0 citations46
US9330988B1May 3, 2016
Method of fine-tuning process controls during integrated circuit chip manufacturing based on substrate backside roughness
IBM1 citations46