Inventor
LU MING-SHANE
TW5 patents
Patents
5 patentsUS9733568B2Aug 15, 2017
Tool and method of developing
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations82
US10627718B2Apr 21, 2020
Developing method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US10101662B2Oct 16, 2018
Developing method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US10705436B2Jul 7, 2020
Overlay mark and method of fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations63
US11150558B2Oct 19, 2021
Developing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60