Inventor
TURN LI-KONG
TW18 patents
⚠️ This page may combine multiple inventors who share the name “TURN LI-KONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
9 patentsUS7029800B2Apr 18, 2006
Reticle with antistatic coating
TAIWAN SEMICONDUCTOR MFG13 citations82
US6734116B2May 11, 2004
Damascene method employing multi-layer etch stop layer
TAIWAN SEMICONDUCTOR MFG19 citations80
US6975407B1Dec 13, 2005
Method of wafer height mapping
TAIWAN SEMICONDUCTOR MFG7 citations71
US6330355B1Dec 11, 2001
Frame layout to monitor overlay performance of chip composed of multi-exposure images
TAIWAN SEMICONDUCTOR MFG10 citations68
US6190810B1Feb 20, 2001
Mark focusing system for steppers
TAIWAN SEMICONDUCTOR MFG4 citations59
US7301604B2Nov 27, 2007
Method to predict and identify defocus wafers
TAIWAN SEMICONDUCTOR MFG3 citations58
US7514184B2Apr 7, 2009
Reticle with antistatic coating
TAIWAN SEMICONDUCTOR MFG0 citations50
US8683395B2Mar 25, 2014
Method and system for feed-forward advanced process control
TAIWAN SEMICONDUCTOR MFG1 citations47
US8048589B2Nov 1, 2011
Phase shift photomask performance assurance method
TAIWAN SEMICONDUCTOR MFG0 citations41
TAIWAN SEMICONDUCTOR MFG CO LTD
6 patentsUS9733568B2Aug 15, 2017
Tool and method of developing
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations82
US10627718B2Apr 21, 2020
Developing method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US10101662B2Oct 16, 2018
Developing method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US11150558B2Oct 19, 2021
Developing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US9442391B2Sep 13, 2016
Overlay sampling methodology
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations54
US9908201B2Mar 6, 2018
Systems and methods for edge bead removal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49