Inventor
FINDLER GUENTHER
DE12 patents
Patents
12 patentsUS5071510ADec 10, 1991
Process for anisotropic etching of silicon plates
BOSCH GMBH ROBERT105 citations96
US5629538AMay 13, 1997
Semiconductor sensor having a protective layer
BOSCH GMBH ROBERT53 citations95
US5553790ASep 10, 1996
Orifice element and valve with orifice element
BOSCH GMBH ROBERT66 citations95
US5452610ASep 26, 1995
Mass-flow sensor
BOSCH GMBH ROBERT35 citations92
US5324410AJun 28, 1994
Device for one-sided etching of a semiconductor wafer
BOSCH GMBH ROBERT51 citations90
US5553789ASep 10, 1996
Orifice element
BOSCH GMBH ROBERT7 citations73
US5355569AOct 18, 1994
Method of making sensor
BOSCH GMBH ROBERT16 citations73
US5282926AFeb 1, 1994
Method of anisotropically etching monocrystalline, disk-shaped wafers
BOSCH GMBH ROBERT17 citations73
US5242533ASep 7, 1993
Method of structuring a semiconductor chip
BOSCH GMBH ROBERT17 citations73
US5421952AJun 6, 1995
Method for the manufacture of silicon injection plates and silicon plates produced thereby
BOSCH GMBH ROBERT10 citations72
US5467649ANov 21, 1995
Mass flow sensor having a measuring element arranged on a membrane retained on a monocrystalline silicon wafer
BOSCH GMBH ROBERT4 citations62
US5431052AJul 11, 1995
Capacitive sensor
BOSCH GMBH ROBERT5 citations58