Inventor
HAN HAK-SEUNG
KR5 patents
⚠️ This page may combine multiple inventors who share the name “HAN HAK-SEUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUXPERT TECHNOLOGIES CO LTD
2 patentsSAMSUNG ELECTRONICS CO LTD
2 patentsUS10048601B2Aug 14, 2018
Apparatus for measuring mask error and method therefor
SAMSUNG ELECTRONICS CO LTD0 citations49
US7939223B2May 10, 2011
Photomask using separated exposure technique, method of fabricating photomask, and apparatus for fabricating photomask by using the method
SAMSUNG ELECTRONICS CO LTD0 citations40