Inventor
TSANG VINCENT
US5 patents
⚠️ This page may combine multiple inventors who share the name “TSANG VINCENT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
3 patentsUS10978330B2Apr 13, 2021
On the fly automatic wafer centering method and apparatus
BROOKS AUTOMATION INC14 citations92
US10134623B2Nov 20, 2018
On the fly automatic wafer centering method and apparatus
BROOKS AUTOMATION INC9 citations82
US11776834B2Oct 3, 2023
On the fly automatic wafer centering method and apparatus
BROOKS AUTOMATION INC1 citations71